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Please use this identifier to cite or link to this item: http://hdl.handle.net/11154/1195

Title: A study on the flexibility of the hot-filament configuration and its implementation for diamond, boron carbide and ternary alloys deposition
Authors: Soto, G
Silva, G
Contreras, O
Issue Date: 2006
Abstract: This paper presents an experimental report on the conditions to grow films with variable composition in the Ta-B-C triangle using the hot-filament (HF) configuration. The HF-Chemical Vapor Deposition (HFCVD) mode is when the precursors for film growth are obtained exclusively from the gas-phase species. Diamond films were produced by feeding the growth system with hydrogen-diluted methane, beta-boron films by substituting the methane fraction with diborane, and boron carbide using mixtures of both gases. A second operational mode is achieved when filament sublimation is allowed. In this HF-Physical Vapor Deposition (HFPVD) mode the species stemming from filament and reacting with the gas-atmosphere are the precursors for film growth. The deposition of TaC and TaBC films by means of Ta filaments is reported. A very versatile mode was found when the conditions are adapted during the period of the deposition, switching from PVD to CVD to grow diamond on in-situ deposited TaC. (c) 2006 Elsevier B.V. All rights reserved.
URI: http://hdl.handle.net/11154/1195
ISSN: 0257-8972
Appears in Collections:Ciencias

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